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IL 2600 Datasheet Access

  • IL 2600 Product brochure

    IL 2600

    Sorting System

    The InnoLas IL 2600 wafer sorting system can automatically sort, split, merge and transfer wafers from any slot / cassette to any other slot / cassette in a six cassette array.

    Wafer sizes from 2“ to 100mm and 100mm to 200mm can be handled in a single or multi-batch operation without the need of any mechanical adjustments.