Wafer Marking System
The Innolas IL C 3000 is a state of the art class 1 mini environment marking system for 300mm Silicon wafers.
The system allows fully automated laser marking of polished 300mm wafers in FOUP cassettes using our debris free processing techniques. The integrated mini environment has an ionization unit with laminar flow and pressure control.
The two station system can be loaded by the system operator or with an OHT (over head transport) system following the SEMI E84 standard.