InnoLas lasers are specifically designed for marking semiconductor wafers giving a repeateable mark every time. With ultra reliable marking you will never lose your wafer as it goes through processing. Marking that works with commercially available readers and continuous development means you can be confident of human and machine readable marking.
Nd:YAG 355/532/1064 & CO2 10.600nm for the unique Identification of your wafers Dot Depth 0,1 – 100µm (depending on laser & material) Dot Diameter 25 – 150 µm (depending on laser & material)...
IL 600 »
The Innolas IL 1000 Laser Marking series was developed for simple or advanced marking of a broad range of material types, sizes and geometries....
IL 1000 »
The Innolas IL 2000 series laser system is designed to mark various wafer materials with diameters ranging from 2“ to 200mm....
IL 2000 »
The Innolas IL 3000 (Plus) series laser system is designed to mark 300mm Silicon wafers....
IL 3000 »
The Innolas IL C 3000 is a state of the art class 1 mini environment marking system for 300mm Silicon wafers....
IL C3000 »
The InnoLas Wafer Marking System IL C3000 HT for the unique Identification of your wafers...
IL C3000 HT »
Wafer Sizes 300/450 mm ±75 µm (high precision) / ±100 µm (standard) Nd:YAG 355/532/1064 & CO2 10.600nm...
IL 4000 »
Mini Environment ISO 3 (ISO 14644-1) / Class 1 (US FED STD 209E) Loading Stations Up to 3 Wafer Transfer Single Arm Robot – Single End Effector...
IL C4000 »