Sales & Support: +44 (0) 1527 959 099

IL1000 WMA Datasheet Access

  • innolas 1000 WMA

    IL1000 WMA

    Laser Marking System

    • Wafer Size Range: 2” to 5” or 3” to 200mm, flat or notched wafer
    • Wafer Transfer: 3-axis robot with single arm vacuum end effector
    • Wafer Alignment: Optical aligner with vacuum chuck
    • Cassette Stations: Single station incl. cassette size detection
    ...