IL1000 WMA Datasheet Access

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  IL1000 WMA

  Laser Marking System

  • Wafer Size Range: 2” to 5” or 3” to 200mm, flat or notched wafer
  • Wafer Transfer: 3-axis robot with single arm vacuum end effector
  • Wafer Alignment: Optical aligner with vacuum chuck
  • Cassette Stations: Single station incl. cassette size detection

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