Advanced Wafer Sorting System
The Innolas IL C 3800 is a multi-functional system for sorting, transfering and inspection of 300mm wafers. The detailed configuration and extensive accessories results in the IL C 3800 being an exceptionally powerful and multi-faceted solution. The integrated mini environment has an ionization unit with laminar flow and pressure control.
The IL C 3800 can be equipped with up to seven load/unload stations that can be loaded manually or automatically in accordance with the SEMI E84 specification. The system uses an Innolas edge grip handling system together with a patented Innolas edge grip aligner for automatic orientation of 300mm wafers.