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IL 2000 Datasheet Access

  • IL 2000 Laser marking System

    IL 2000

    • Wafer sizes: 2’’, 2.25’’, 3’’, 3.25’’ and 100, 125, 150, 200mm
    • Wafer transfer: Robot - double end effector
    • Wafer alignment: Opto mechanical aligner
    • Wafer handling: Vacuum or edge grip
    • Number of stations: 4 stations (input / output)
    • Throughput: 220 wafers/hr (SEMI M13-88 without reading)
    ...